Speciální technologie

The group is concerned with both the development of technologies and the design and construction of technological equipment representing the basis for the building of electron optical devices operating in vacuum or ultrahigh vacuum conditions. These technologies include electron beam welding and micromachining, vacuum brazing, pulsed laser welding, the development and manufacturing of vacuum electric feedthroughs, etc.

The group is concerned with r.f. magnetron sputtering of thin films for more than ten years. We have been preparing thin films (e.g. Al, Si ,Mo, Ti, Ni, Ag, C, ITO, Nb, W, TiN, Si3N4, SiO2 and their combination) intended for the use in projects of our Institute. In our laboratory we started production of multilayer systems consisting of a large number of double layers of nanometer thickness for use in the x-ray optics.