Speciální technologie

Jaroslav Lahoda

Email: jar@isibrno.cz

Tel.: +420 541 514 301

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Stanislav Král

Email: kral@isibrno.cz

Tel.: +420 541 514 222

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Ing. Jan Grossman, CSc.

Email: grossman@isibrno.cz

Tel.: +420 541 514 339

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Ing. Libor Dupák, Ph.D.

Email: ldupak@isibrno.cz

Tel.: +420 541 514 316

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Miroslav Dirga

Email: dirga@isibrno.cz

Tel.: +420 541 514 281

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Ing. Tomáš Fořt, Ph.D.

Email: fortt@isibrno.cz

Tel.: +420 541 514 339

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Electron and Plasma Technologies

The Special technology department of the Institute of Scientific Instruments of the CAS in Brno deals with the development of technologies and design of technological devices, which constitute the necessary background for the construction electron-optical devices operating in a vacuum, respectively. ultra-high environment.

English

Electron Beam Lithography

The EBL group deals with the research in the field of microlithographic technologies using e-beam pattern generators.

English

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