Speciální technologie

Ing. Jaroslav Kopal

Email: kopal@isibrno.cz

Tel.: +420 541 514 523

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Bc. Adam Janiš

Tel.: +420 541 514 220

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Single-pin vacuum feedthrough

Single-pin vacuum glass-sealing feedthrough. The feedthrough can be electron-beam welded, e.g. into custom flange. Its operational temperature range is –196°C to +400°C. It can be used for UHV.

English

Ivana Vlčková

Email: ivi@isibrno.cz

Tel.: +420 541 514 296

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EBL for Nanotechnologies

Elektronový litograf Tesla BS600

English

Industrial Holography using E-Beam Lithography

  • Large-area micro structures as optical elements for shaping of laser beam;
  • Sub-micron holographic structure in the application area of industrial holography;
  • DOVID — Diffractive Optically Variable Image Device

Results

English

Microlithography Techniques

Technology of structures prepared in thin layers of metal and dielectrics on silicon or glass substrates. Combined electron beam lithography.

English

Publications - Electron Lithography

All publications are registered in on-line ASEP database.
English

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