Speciální technologie

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Ing. Jaroslav Kopal

Email: kopal@isibrno.cz

Tel.: +420 541 514 523

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Bc. Adam Janiš

Tel.: +420 541 514 220

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Single-pin vacuum feedthrough

Single-pin vacuum glass-sealing feedthrough. The feedthrough can be electron-beam welded, e.g. into custom flange. Its operational temperature range is –196°C to +400°C. It can be used for UHV.

English

Ivana Vlčková

Email: ivi@isibrno.cz

Tel.: +420 541 514 296

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EBL for Nanotechnologies

Elektronový litograf Tesla BS600

English

Industrial Holography using E-Beam Lithography

  • Large-area micro structures as optical elements for shaping of laser beam;
  • Sub-micron holographic structure in the application area of industrial holography;
  • DOVID — Diffractive Optically Variable Image Device

Results

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Microlithography Techniques

Technology of structures prepared in thin layers of metal and dielectrics on silicon or glass substrates. Combined electron beam lithography.

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Publications - Electron Lithography

All publications are registered in on-line ASEP database.
English

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