Industrial Holography using E-Beam Lithography
ResultsAs an example, some DOVID's were designed and implemented for public presentation of the Institute of Scientific Instruments (ISI) and The Czech Academy of Sciences (CAS). |
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DOVID "isi9". Exposure using the pattern generator EBPG5000+ES. Produced to mark the 60th anniversary of the ISI (2017). |
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E-Beam Lithography Group (EBL) Research Areas:
Offered Technologies:
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DOVID "cas1". Exposure using the pattern generator EBPG5000+ES. Produced to mark the 125th anniversary of the CAS (2015). |
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DOVID "isi1". Exposure using the pattern generator BS600 in the TZ mode. Produced to mark the opening of Application Laboratories of Microtechnologies and Nanotechnologies (alisi) of the ISI (2013). |
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Výzkumná skupina:
Electron Beam Lithography