Numerical analysis of ion flux and concentration for high-efficiency detection of signal electrons in ESEM/A-ESEM

583005

Numerical analysis of ion flux and concentration for high-efficiency detection of signal electrons in ESEM/A-ESEM

Fundamental research on electron/ion-gas-solid interactions, in particular the generation, multiplication and high-efficiency detection of secondary, backscattered and transmitted electrons under conditions of controlled positive ion concentration and flow, will be studied using numerical simulations.

ISI investigator: 
doc. Ing. et Ing. Vilém Neděla, Ph.D., DSc.
Investigator: 
Neděla Vilém - Ústav přístrojové techniky AV ČR, v.v.i.
Agency: 
GA ČR
Identif. Code: 
26-20858S
Date from: 
1. 1. 2026
Date to: 
31. 12. 2028