Numerical analysis of ion flux and concentration for high-efficiency detection of signal electrons in ESEM/A-ESEM
583005
Numerical analysis of ion flux and concentration for high-efficiency detection of signal electrons in ESEM/A-ESEM
Fundamental research on electron/ion-gas-solid interactions, in particular the generation, multiplication and high-efficiency detection of secondary, backscattered and transmitted electrons under conditions of controlled positive ion concentration and flow, will be studied using numerical simulations.
ISI investigator:
doc. Ing. et Ing. Vilém Neděla, Ph.D., DSc.
Investigator:
Neděla Vilém - Ústav přístrojové techniky AV ČR, v.v.i.
Agency:
GA ČR
Identif. Code:
26-20858S
Date from:
1. 1. 2026
Date to:
31. 12. 2028










