Publications
Export 3 results:
Filtry: Autor je Novotny, Jan [Clear All Filters]
Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring. Journal of Vacuum Science & Technology B, 43, 034202 (2025).
. Design of Setup for Laser Induced Plasma Etching, 2024 37th International Vacuum Nanoelectronics Conference (IVNC), 2024.
. Design of Setup for Laser Induced Plasma Etching, 2024 37th International Vacuum Nanoelectronics Conference (IVNC), 2024.
.