01783nas a2200133   4500008004100000022001400041245010000055210006900155260000700224300001100231490000700242520136200249856003801611       2025                        eng d  a2166-274600aCompact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring0 aCompact vacuum setup for laser induced plasma etching with optic  c04  a0342020 v433 a<p>Reactive ion etching and reactive ion beam etching are widely used processes in the semiconductor industry but face challenges due to their high cost, energy demands, and maintenance complexity. Femtosecond laser micromachining has emerged as a versatile and precise method for microfabrication, but it often results in suboptimal surface quality, which requires postprocessing. Laser-induced plasma etching (LIPE) presents a promising solution, achieving low surface roughness and efficient material removal rates. Here, we investigate the LIPE process by utilizing a femtosecond laser setup with optimized optical components and a custom-designed compact vacuum chamber, enabling precise control and monitoring of the reactive gas environment for plasma generation and etching. The effects of numerical aperture, working distance, and laser energy thresholds on plasma ignition and plume formation were examined. Preliminary results demonstrate plasma ignition in air and SF6 gas with laser pulse energy thresholds between 15 and 20 μJ using a 10× magnification microscope objective. The spectral analysis of the plasma generated in the SF6 gas provides insights into plasma dynamics and enables real-time process monitoring. This work establishes foundational parameters for optimizing LIPE setups and advancing precision etching applications.</p>  uhttps://doi.org/10.1116/6.000429600256nas a2200073   4500008004100000245005300041210005300094856003500147       2024                        eng d00aDesign of Setup for Laser Induced Plasma Etching0 aDesign of Setup for Laser Induced Plasma Etching  uhttp://isibrno.cz/en/node/399700344nas a2200097   4500008004100000245007900041210006900120300001500189490000700204856003500211       2016                        eng d00aHolographic Raman tweezers controlled by Multimodal Natural User Interface0 aHolographic Raman tweezers controlled by Multimodal Natural User  a015602:1-90 v18  uhttp://isibrno.cz/en/node/301900324nas a2200085   4500008004100000245008600041210006900127490000700196856003500203       2015                        eng d00aIdentification of individual biofilm-forming bacterial cells using Raman tweezers0 aIdentification of individual biofilmforming bacterial cells usin0 v20  uhttp://isibrno.cz/en/node/302400370nas a2200097   4500008004100000245010800041210006900149300001200218490000700230856003500237       2015                        eng d00aMonitoring of Multilayered Bacterial Biofilm Morphology by Cryo-SEM for Raman Spectroscopy Measurements0 aMonitoring of Multilayered Bacterial Biofilm Morphology by CryoS  a187-1880 v21  uhttp://isibrno.cz/en/node/302200364nas a2200097   4500008004100000245009800041210006900139300001600208490000700224856003500231       2013                        eng d00aFollowing the mechanisms of bacteriostatic versus bacericidal action using Raman spectroscopy0 aFollowing the mechanisms of bacteriostatic versus bacericidal ac  a13188-131990 v18  uhttp://isibrno.cz/en/node/303900339nas a2200097   4500008004100000245007800041210006900119300001200188490000600200856003500206       2013                        eng d00aHolographic Raman tweezers controlled by hand gestures and voice commands0 aHolographic Raman tweezers controlled by hand gestures and voice  a331-3360 v3  uhttp://isibrno.cz/en/node/304500341nas a2200097   4500008004100000245007600041210007100117300001200188490000800200856003500208       2013                        eng d00aOptical trapping of microalgae at 735–1064 nm: Photodamage assessment0 aOptical trapping of microalgae at 735–1064 nm Photodamage assess  a27 - 310 v121  uhttp://isibrno.cz/en/node/303800383nas a2200097   4500008004100000245011800041210006900159300001200228490001000240856003500250       2012                        eng d00aApplication of laser-induced breakdown spectroscopy to the analysis of	algal biomass for industrial biotechnology0 aApplication of laserinduced breakdown spectroscopy to the analys  a169-1760 v74-75  uhttp://isibrno.cz/en/node/304700342nas a2200097   4500008004100000245008000041210006900121300001200190490000700202856003500209       2012                        eng d00aRaman microspectroscopy of algal lipid bodies: beta-carotene quantification0 aRaman microspectroscopy of algal lipid bodies betacarotene quant  a541-5460 v24  uhttp://isibrno.cz/en/node/304600338nas a2200109   4500008004100000022001400041245005700055210005700112300001700169490000700186856003500193       2008                        eng d  a0003-695100aStatic optical sorting in a laser interference field0 aStatic optical sorting in a laser interference field  a161110:1–30 v92  uhttp://isibrno.cz/en/node/306800357nas a2200109   4500008004100000022001400041245006800055210006700123300001600190490000600206856003500212       2007                        eng d  a1464-425800aAxial optical trap stiffness influenced by retro-reflected beam0 aAxial optical trap stiffness influenced by retroreflected beam  aS251–S2550 v9  uhttp://isibrno.cz/en/node/307300344nas a2200097   4500008004100000245008100041210006900122300001400191490000600205856003500211       2007                        eng d00aOpto-fluidic micromanipulation system based on integrated polymer waveguides0 aOptofluidic micromanipulation system based on integrated polymer  a2148-21510 v9  uhttp://isibrno.cz/en/node/307700371nas a2200097   4500008004100000245010700041210006900148300001400217490000700231856003500238       2006                        eng d00aOptical forces generated by evanescent standing waves and their usage for sub-micron particle delivery0 aOptical forces generated by evanescent standing waves and their   a157–1650 v84  uhttp://isibrno.cz/en/node/308000349nas a2200097   4500008004100000245008400041210006900125300001500194490000700209856003500216       2006                        eng d00aOptical sorting and detection of sub-micron objects in a motional standing wave0 aOptical sorting and detection of submicron objects in a motional  a035105:1-60 v74  uhttp://isibrno.cz/en/node/308200343nas a2200097   4500008004100000245007900041210006900120300001400189490000700203856003500210       2003                        eng d00aBehaviour of an optically trapped probe approaching a dielectric interface0 aBehaviour of an optically trapped probe approaching a dielectric  a1615-16250 v50  uhttp://isibrno.cz/en/node/308800348nas a2200097   4500008004100000245008500041210006900126300001200195490000800207856003500215       2003                        eng d00aTheoretical comparison of optical traps created by standing wave and single beam0 aTheoretical comparison of optical traps created by standing wave  a401-4120 v220  uhttp://isibrno.cz/en/node/3087