@article {4125,
	title = {Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring},
	journal = {Journal of Vacuum Science \& Technology B},
	volume = {43},
	year = {2025},
	month = {04},
	pages = {034202},
	abstract = {<p>Reactive ion etching and reactive ion beam etching are widely used processes in the semiconductor industry but face challenges due to their high cost, energy demands, and maintenance complexity. Femtosecond laser micromachining has emerged as a versatile and precise method for microfabrication, but it often results in suboptimal surface quality, which requires postprocessing. Laser-induced plasma etching (LIPE) presents a promising solution, achieving low surface roughness and efficient material removal rates. Here, we investigate the LIPE process by utilizing a femtosecond laser setup with optimized optical components and a custom-designed compact vacuum chamber, enabling precise control and monitoring of the reactive gas environment for plasma generation and etching. The effects of numerical aperture, working distance, and laser energy thresholds on plasma ignition and plume formation were examined. Preliminary results demonstrate plasma ignition in air and SF6 gas with laser pulse energy thresholds between 15 and 20 μJ using a 10{\texttimes} magnification microscope objective. The spectral analysis of the plasma generated in the SF6 gas provides insights into plasma dynamics and enables real-time process monitoring. This work establishes foundational parameters for optimizing LIPE setups and advancing precision etching applications.</p>},
	issn = {2166-2746},
	doi = {10.1116/6.0004296},
	url = {https://doi.org/10.1116/6.0004296}
}
@conference {3997,
	title = {Design of Setup for Laser Induced Plasma Etching},
	booktitle = {2024 37th International Vacuum Nanoelectronics Conference (IVNC)},
	year = {2024},
	doi = {10.1109/IVNC63480.2024.10652276}
}
@conference {4127,
	title = {Design of Setup for Laser Induced Plasma Etching},
	booktitle = {2024 37th International Vacuum Nanoelectronics Conference (IVNC)},
	year = {2024},
	doi = {10.1109/IVNC63480.2024.10652276}
}
@article { TomoriJOpt16,
	title = {Holographic Raman tweezers controlled by Multimodal Natural User Interface},
	journal = {J. Opt.},
	volume = {18},
	year = {2016},
	pages = {015602:1-9},
	doi = {10.1088/2040-8978/18/1/015602}
}
@article { SamekJBO15,
	title = {Identification of individual biofilm-forming bacterial cells using Raman tweezers},
	journal = {J. Biomed. Opt.},
	volume = {20},
	number = {5},
	year = {2015},
	doi = {10.1117/1.JBO.20.5.051038}
}
@article { HrubanovaMM15,
	title = {Monitoring of Multilayered Bacterial Biofilm Morphology by Cryo-SEM for Raman Spectroscopy Measurements},
	journal = {Microscopy and Microanalysis},
	volume = {21},
	year = {2015},
	pages = {187-188},
	doi = {10.1017/S1431927615001737}
}
@article { BernatovaMol13,
	title = {Following the mechanisms of bacteriostatic versus bacericidal action using Raman spectroscopy},
	journal = {Molecules},
	volume = {18},
	year = {2013},
	pages = {13188-13199},
	doi = {10.3390/molecules181113188}
}
@article { TomoriOPJ13,
	title = {Holographic Raman tweezers controlled by hand gestures and voice commands},
	journal = {Optics and Photonics Journal},
	volume = {3},
	year = {2013},
	pages = {331-336},
	doi = {10.4236/opj.2013.32B076}
}
@article { PilatJPPB13,
	title = {Optical trapping of microalgae at 735{\textendash}1064 nm: Photodamage assessment},
	journal = {J. Photochem. Photobiol. B},
	volume = {121},
	year = {2013},
	pages = {27 - 31},
	doi = {10.1016/j.jphotobiol.2013.02.006}
}
@article {PorizkaSAB12,
	title = {Application of laser-induced breakdown spectroscopy to the analysis of	algal biomass for industrial biotechnology},
	journal = {Spectrochim. Acta B},
	volume = {74-75},
	year = {2012},
	pages = {169-176},
	doi = {10.1016/j.sab.2012.06.014}
}
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	title = {Raman microspectroscopy of algal lipid bodies: beta-carotene quantification},
	journal = {J. Appl. Phycol.},
	volume = {24},
	year = {2012},
	pages = {541-546},
	doi = {10.1007/s10811-011-9754-4}
}
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	title = {Static optical sorting in a laser interference field},
	journal = {Appl. Phys. Lett.},
	volume = {92},
	number = {16},
	year = {2008},
	pages = {161110:1{\textendash}3},
	issn = {0003-6951},
	doi = {10.1063/1.2913759}
}
@article { JaklJOPAA07,
	title = {Axial optical trap stiffness influenced by retro-reflected beam},
	journal = {J. Opt. A: Pure Appl. Opt.},
	volume = {9},
	number = {8, Sp. Iss. SI},
	year = {2007},
	pages = {S251{\textendash}S255},
	issn = {1464-4258},
	doi = {10.1088/1464-4258/9/8/S19}
}
@article { JaklJOAM07,
	title = {Opto-fluidic micromanipulation system based on integrated polymer waveguides},
	journal = {J. Optoel Adv. Mater.},
	volume = {9},
	year = {2007},
	pages = {2148-2151}
}
@article {SilerAPB06,
	title = {Optical forces generated by evanescent standing waves and their usage for sub-micron particle delivery},
	journal = {Appl. Phys. B},
	volume = {84},
	year = {2006},
	pages = {157{\textendash}165},
	doi = {10.1007/s00340-006-2235-9}
}
@article {CizmarPRB06,
	title = {Optical sorting and detection of sub-micron objects in a motional standing wave},
	journal = {Phys. Rev. B},
	volume = {74},
	year = {2006},
	pages = {035105:1-6},
	doi = {10.1103/PhysRevB.74.035105}
}
@article {JaklJMO03,
	title = {Behaviour of an optically trapped probe approaching a dielectric interface},
	journal = {J Mod. Optics},
	volume = {50},
	year = {2003},
	pages = {1615-1625},
	doi = {10.1080/09500340308235235}
}
@article {ZemanekOPTCOMM03,
	title = {Theoretical comparison of optical traps created by standing wave and single beam},
	journal = {Opt. Commun.},
	volume = {220},
	year = {2003},
	pages = {401-412},
	doi = {10.1016/S0030-4018(03)01409-3}
}
