02013nas a2200229   4500008004100000022001400041245010000055210006900155260000700224300001100231490000700242520136200249653000801611653000701619100001801626700002301644700002101667700002001688700001701708700002001725856003801745       2025                        eng d  a2166-274600aCompact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring0 aCompact vacuum setup for laser induced plasma etching with optic  c04  a0342020 v433 a<p>Reactive ion etching and reactive ion beam etching are widely used processes in the semiconductor industry but face challenges due to their high cost, energy demands, and maintenance complexity. Femtosecond laser micromachining has emerged as a versatile and precise method for microfabrication, but it often results in suboptimal surface quality, which requires postprocessing. Laser-induced plasma etching (LIPE) presents a promising solution, achieving low surface roughness and efficient material removal rates. Here, we investigate the LIPE process by utilizing a femtosecond laser setup with optimized optical components and a custom-designed compact vacuum chamber, enabling precise control and monitoring of the reactive gas environment for plasma generation and etching. The effects of numerical aperture, working distance, and laser energy thresholds on plasma ignition and plume formation were examined. Preliminary results demonstrate plasma ignition in air and SF6 gas with laser pulse energy thresholds between 15 and 20 μJ using a 10× magnification microscope objective. The spectral analysis of the plasma generated in the SF6 gas provides insights into plasma dynamics and enables real-time process monitoring. This work establishes foundational parameters for optimizing LIPE setups and advancing precision etching applications.</p>10aAIF10aMF1 aSilhan, Lukas1 aArregi, Jon, Ander1 aPlichta, Tomáš1 aVaculik, Ondrej1 aNovotny, Jan1 aŠerý, Mojmír  uhttps://doi.org/10.1116/6.000429600511nas a2200169   4500008004100000245005300041210005300094653000800147653000700155100001800162700001700180700002100197700001600218700002000234700002000254856006700274       2024                        eng d00aDesign of Setup for Laser Induced Plasma Etching0 aDesign of Setup for Laser Induced Plasma Etching10aAIF10aMF1 aSilhan, Lukas1 aNovotny, Jan1 aPlichta, Tomáš1 aJežek, Jan1 aVaculik, Ondrej1 aŠerý, Mojmír  uhttp://isibrno.cz/cs/design-setup-laser-induced-plasma-etching00675nas a2200181   4500008004100000020001800041245013100059210006900190250001100259260001000270300001400280653000800294653000700302100002100309700002100330700001900351856012300370       2024                        eng d  a978139423820000aFunctional Interlayers Developed to Control Interfacial Adhesion in Polymer Composites Reinforced with Glass and Basalt Fibers0 aFunctional Interlayers Developed to Control Interfacial Adhesion  aVol. 8  bWiley  a119–18810aAIF10aMF1 aPlichta, Tomáš1 aČech, Vladimír1 aMittal, K., L.  uhttp://isibrno.cz/cs/functional-interlayers-developed-control-interfacial-adhesion-polymer-composites-reinforced-glass01782nas a2200193   4500008004100000022001400041245011200055210006900167520117100236653000801407653000701415100002401422700001701446700001801463700002301481700001601504700002101520856004701541       2023                        eng d  a1433-301500aAnalysis of the machinability of different types of sintered carbides with WEDM in both water and oil baths0 aAnalysis of the machinability of different types of sintered car3 a<p>The unconventional wire electric discharge machining (WEDM) technology represents a vital manufacturing technology in different industrial branches. This technology is essential because of the possibility to machine difficult-to-machine materials such as sintered carbides. For this reason, this study analyses the machinability of sintered carbides WKP23S, WSM33S and WK1 with WEDM in both water and oil baths. We investigated the influence of the machining parameters, namely, pulse off time, gap voltage, discharge current, pulse on time and wire feed, on the cutting speed, surface roughness and defect occurrence. We investigated 9 different roughness parameters, analysed surface morphology with an electron microscope and also analysed cross-sectioned samples. We found out that machining sintered carbides in oil bath yields better results than machining in deionized water. The oil tank prevents the removal of the cobalt binder, but it does not reduce fissure occurrence in any significant way. The lowest Ra value, that is 0.7 µm, was recorded for the WKP23S sample when machined in oil and Ra 0.9 µm when the same material was machined in water.</p>10aAIF10aMF1 aMouralova, Katerina1 aBenes, Libor1 aProkes, Tomas1 aZahradnicek, Radim1 aFries, Jiri1 aPlichta, Tomáš  uhttps://doi.org/10.1007/s00170-023-10913-400639nas a2200217   4500008004100000022001400041245006500055210006500120260001100185300000900196490000700205653000800212653000700220100002400227700001800251700001700269700002100286700001800307700001600325856008000341       2022                        eng d  a2045-232200aProduction of precision slots in copper foil using micro EDM0 aProduction of precision slots in copper foil using micro EDM  cMAR 23  a50230 v1210aAIF10aMF1 aMouralova, Katerina1 aBednar, Josef1 aBenes, Libor1 aPlichta, Tomáš1 aProkes, Tomas1 aFries, Jiri  uhttp://isibrno.cz/cs/production-precision-slots-copper-foil-using-micro-edm02406nas a2200205   4500008004100000022001400041245009600055210006900151300000800220490000700228520179900235653000802034653000702042100002102049700002602070700001802096700002102114700002102135856004402156       2021                        eng d  a2073-436000aThe Adhesion of Plasma Nanocoatings Controls the Shear Properties of GF/Polyester Composite0 aAdhesion of Plasma Nanocoatings Controls the Shear Properties of  a5930 v133 a<p>High-performance fibre-reinforced polymer composites are important construction materials based not only on the specific properties of the reinforcing fibres and the flexible polymer matrix but also on the compatible properties of the composite interphase. First, oxygen-free (a-CSi:H) and oxygen-binding (a-CSiO:H) plasma nanocoatings of different mechanical and tribological properties were deposited on planar silicon dioxide substrates that closely mimic E-glass. The nanoscratch test was used to characterize the nanocoating adhesion expressed in terms of critical normal load and work of adhesion. Next, the same nanocoatings were deposited on E-glass fibres, which were used as reinforcements in the polyester composite to affect its interphase properties. The shear properties of the polymer composite were characterized by macro- and micromechanical tests, namely a short beam shear test to determine the short-beam strength and a single fibre push-out test to determine the interfacial shear strength. The results of the polymer composites showed a strong correlation between the short-beam strength and the interfacial shear strength, proving that both tests are sensitive to changes in fibre-matrix adhesion due to different surface modifications of glass fibres (GF). Finally, a strong correlation between the shear properties of the GF/polyester composite and the adhesion of the plasma nanocoating expressed through the work of adhesion was demonstrated. Thus, increasing the work of adhesion of plasma nanocoatings from 0.8 to 1.5 mJ·m−2 increased the short-beam strength from 23.1 to 45.2 MPa. The results confirmed that the work of adhesion is a more suitable parameter in characterising the level of nanocoating adhesion in comparison with the critical normal load.</p>10aAIF10aMF1 aPlichta, Tomáš1 aŠirjovová, Veronika1 aZvonek, Milan1 aKalinka, Gerhard1 aČech, Vladimír  uhttps://www.mdpi.com/2073-4360/13/4/593