Normal Incidence: We deposit X-ray molybdenum/silicon multilayer system, which can be used in the range from about 12 - 30 nm. Peak reflectance values are approaching 70%.

Grazing Incidence: At very short X-ray wavelengths (wavelengths below about 4 nm) efficient normal incidence multilayers cannot be produced because interface roughness cause too much reduction in the reflectance. However periodic multilayers can still be used at near grazing incidence. They provide high reflectance at graze angles that are much larger than what can be achieved with single-layer coatings.

This picture represents typical Mo/Si normal incidence x-ray mirror deposited in our laboratory.

Cross-sectional transmission electron micrograph of a Mo/Si multilayer deposited in our laboratory.

In case of your interest do not hesitate to contact Jaroslav Sobota or visit his personal page.

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[Special Technologies Laboratory] [Institute of Scientific Instruments] [Academy of Sciences of the CR]

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